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Laboratory / small-scale production equipment
Sputtering Equipment
E-401S/402S
The compact and smart E-401S/402S sputtering equipment embodies our substantial vacuum and sputtering techniques. The  equipment in cassette-to-cassette specifications, which allows continuous automatic deposition of multiple substrates with simple switch operation, is ideal for R&D and small-scale productions.
e401s402s
Sputtering Equipment
E-200S
The compact E-200S sputtering equipment provided with multiple functions satisfies various needs in the field of R&D.
e200s
Sputtering Equipment
E-400S
The E-400S general-purpose sputtering equipment provided with substantial functions as standard satisfies various needs in the field of R&D and production.
e400s